16 . 3 A Fast Optical Propagation Technique for Modeling Micro - Optical Systems

As designers become more aggressive in introducing optical components to micro-systems, rigorous optical models are required for system-level simulation tools. Common optical modeling techniques and approximations are not valid for most optical micro-systems, and those techniques that provide accurate simulation are computationally slow. In this paper, we introduce an angular frequency optical propagation technique that greatly reduces computation time while achieving the accuracy of a full scalar formulation. We present simulations of a diffractive optical MEM Grating Light Valve to show the advantages of this optical propagation method and the integration of the technique into a system-level multi-domain CAD tool.